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NEWMain unit of organic molecular evaporator
ME-203C/204C series

Specification of Main unit of organic molecular evaporator

Structure
EvaporatorCrucible-type evaporator
Heating methodDirect resistance heating by filament
Inner volume
of crucible
2.6 mm (dia.) x 6 mm (depth) (material: tantalum)
Number of
elements
(crucibles)
Four for an evaporator with no shutter function; Three for an evaporator with the shutter function
* The main body needs to be returned to Unisoku for the crucible exchange.
Additional expenses are also needed.
Mounting flangeICF70
Connector10-pin current lead terminal
Cooling
mechanism
A water-cooling jacket is provided as standard
(amount of water: 1 L/min.)
* Water cooling is indispensable, especially when the evaporator is used at 500 degree C or higher.
Distance from
the flange face
to the crucible
head tip
At least 100 mm from the mounting flange face to the crucible head tip (with no shutter).
(The distance can be extended at your request at the time of order.)
Target distanceAt least 100 mm from the crucible head tip
Vacuum chamber mounting directionThe vacuum chamber must be mounted at an angle of at least 30 degree from the horizontal.
Performance
Heating
temperature
range
150-800 degree C
* There are some differences between the inside temperature of crucible and setting temperature.
Heating currentMax.7.5A-14V
Baking temperature<200 degree C
Evaporation element
Material formPowder, granule, wire, and other forms that can be placed in the crucible.
Material
fill volume
The recommended amount is 1/2 the volume of the crucible or smaller
(depending on the mounting angle).
Evaporation
material that
can be used
Elements that can be evaporated at 800 degree C or lower. Elements that don't react to tantalum.
Recommended
elements
Various organic molecules
(The material that evaporation temperature is lower than decomposition temperature)
Shutter function -- Provided as standard for the 203CS series
Switching
mechanism
Manual switching using the rotary motion feedthrough(with a rotation stopper)
Shutter plateSize: 34 mm dia.; Rotation diameter: 30 mm
Film thickness gauge function -- Provided as standard for the 203CSF series
Film thickness
gauge element
mounting position
Shutter plate surface
Film thickness
gauge element
Crystal oscillator
Film thickness
monitor
Inficon film thickness gauge element monitor (XTM/2) is provided as standard.