SPM, STM, AFM, Scanning Probe Microscope, Cryostat for Spectrophotometer- UNISOKU
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High-temperature metal evaporator
UHV Multi-element Miniature Evaporators
Main unit of organic molecular evaporator
Temperature Controller
NEWMain unit of high-temperature metal evaporator
ME-103C/104C series
Ultra High Vacuum Multi-element Miniature Evaporators
Main unit of organic molecular evaporator (ME-203C/204C series)
Temperature Controller
LEFT : Main body of Evaporator, RIGHT : Main body of Evaporator with shutter function
Main unit of organic molecular evaporator (ME-203C/204C series)
Temperature Controller
LEFT : Main body of Evaporator, RIGHT : Main body of Evaporator with shutter function
Specification of Main unit of high-temperature metal evaporator
| Structure | |
|---|---|
| Evaporator | Crucible-type evaporator |
| Heating method | Direct resistance heating by filament |
| Inner volume of crucible | 3 mm (dia.) × 6 mm (depth) (material: alumina) |
| Number of elements (crucibles) | Four for an evaporator with no shutter function; Three for an evaporator with the shutter function * The main body needs to be returned to Unisoku for the crucible exchange. Additional expenses are also needed. |
| Mounting flange | ICF70 |
| Connector | 10-pin current lead terminal |
| Cooling mechanism | A water-cooling jacket is provided as standard (amount of water: 1 L/min.) * Water cooling is indispensable, especially when the evaporator is used at 1000 degree C or higher. |
| Distance from the flange face to the crucible head tip | At least 100 mm from the mounting flange face to the crucible head tip (with no shutter). (The distance can be extended at your request at the time of order.) |
| Target distance | At least 100 mm from the crucible head tip |
| Vacuum chamber mounting direction | The vacuum chamber must be mounted at an angle of at least 30 degree from the horizontal. |
| Performance | |
| Heating temperature range | 700-1700 degree C (Recommended temperature during continuous use is 700-1600 degree C) * The maximum temperature is 1600 degree C (current: 7A) when a UNISOKU controller is used for temperature control. * The temperature measurement is not available if the evaporator has no thermometer. * There are some differences between the inside temperature of crucible and setting temperature. |
| Heating current | Max.7.5A-14V |
| Baking temperature | <200 degree C |
| Evaporation element | |
| Material form | Powder, granule, wire, and other forms that can be placed in the crucible. |
| Material fill volume | The recommended amount is 1/2 the volume of the crucible or smaller
(depending on the mounting angle). * Temperature measurement is not available if the evaporator has no thermometer. |
| Evaporation material that can be used | Elements that can be evaporated at 1700 degree C or lower. Note that elements that evaporate at 700 degree C or lower are hard to control. |
| Shutter function -- Provided as standard for the L103CS/103CS series | |
| Switching mechanism | Manual switching using the rotary motion feedthrough (with a rotation stopper) |
| Shutter plate | Size: 34 mm dia.; Rotation diameter: 30 mm |
| Film thickness gauge function -- Provided as standard for the L103CSF/103CSF series | |
| Film thickness gauge element mounting position | Shutter plate surface |
| Film thickness gauge element | Crystal oscillator |
| Film thickness monitor | Inficon film thickness gauge element monitor (XTM/2) is provided as standard. |