Nano/Micro Rotation Stage UMP-1000R
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The Nano/Micro Rotation Stage UMP-1000R Series are small rotation stages developed for applications that require microscopic rotation and position detection in atmospheric and high-vacuum conditions.
Features
- Compact design allows incorporation into a variety of Scanning Electron Microscopes (SEM) and Focused Ion Beam (FIB) systems. (Contact us for details)
- Models are also available with optional rotational angle detection.
- Installing the Unisoku XYZ Three-axis Nano-Manipulator/Prober's Z-stage enables applications that require a XYZ + R (Rotation) four-axis stage.
- Easy operation from a Windows PC.
Primary Applications
- Rotational operation and angle detection under SEM, FIB, and optical microscopy.
- Nano/Micro-manipulation and probing combining XYZ operation and rotational operation.
Lineups
Rotation Stage (R)
- Consists of stage unit, controller, and control software (PC optional).
- Rotational angle detection is available as an option.
- UMP-1000R: No rotational angle detection, UMP-1000RE: With rotational angle detection.
| Rotation Stage UMP-1000R * Rotor shape can be modified |  |
|---|---|
| Rotation Stage UMP-1000RE * Rotor shape can be modified | |
XYZ Three-axis + Rotation (R) Stage
- Consists of stage unit, controller, and control software (PC optional).
- Rotational angle detection is available as an option.
- UMP-1000UR: No rotational angle detection, UMP-1000URE: With rotational angle detection
| Rotor UMP-1000UR * Rotor shape at tip can be modified. No rotational angle detection |  |
|---|---|
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XYZ Three-axis + R (Rotation) Four-axis Stage UMP-1000URE * With rotational angle detection |
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Specifications
| Model No. | UMP-1000R | UMP-1000RE | UMP-1000UR | UMP-1000URE |
|---|---|---|---|---|
| Stage Type | Rotation Stage | XYZ + R (Rotation) 4-Axis Stage | ||
| Angle Detection | No Angle Detection | Angle Detection | No Angle Detection | Angle Detection |
| Unit (Stage) | ||||
| Max. Range of Motion: XYZ Coarse (Pulse) Mode | - | - | XY-axis: >5 mm, Z-axis: >3 mm (Custom orders acceptable) | |
| Max. Range of Motion: XYZ Fine (DC) Mode | - | - | XYZ-axis: >1μm * Modification (i.e., change to piezo element) possible by special order. | |
| Max. Range of Motion: Rotation (Pulse) Mode | >360° | |||
| Min. Resolution: XYZ Coarse (Pulse) Mode | - | - | <150 nm * Modification (change to piezo element) possible by special order - values may vary. | |
| Min. Resolution: XYZ Fine (DC) Mode | - | - | Variable resolution: Max. Range of Motion in DC Mode/20,000 Guaranteed Resolution: Max. Range of Motion in DC Mode/2,000 | |
| Min. Resolution: Rotation (Pulse) Mode | < 0.05° | |||
| Rotation Speed | Approximately 30–120 s/1 rotation (variable) * Varies with size/shape of rotor | |||
| Detection Angle Reading Resolution | - | < 0.25° (Higher resolution available by special order.) | - | < 0.25° (Higher resolution available by special order.) |
| Rotary Shaft Eccentricity | >100 μm (plus-minus Stand) | |||
| Input: Voltage | ±150 V | |||
| Input: Extraction Line | 2 (Twisted pair wire) | |||
| Input: Connector | For D-sub terminal | |||
| Rotation Stage Dimensions (mm) | Rotor OD: 18 mm dia. Stator OD: 30 mm dia. | Rotor OD: 22 mm dia. Stator OD: 22 mm dia. | Rotor OD: 17 mm dia. Stator OD: 22 mm dia. | |
| Weight (Not including mounting base plate) | < 100 g | < 120 g | < 180 g | < 200 g |
| Operating Environment: Vacuum | In air & 10-2 – 10-6 Pa | In air & 10-2 – 10-4 Pa | In air & 10-2 – 10-6 Pa | In air & 10-2 – 10-4 Pa |
| Operating Environment: Service Temperature Range | 4–40°C | |||
| Operating Environment: Service Humidity Range | 15–80% * Cannot be used under condensation conditions due to sudden changes in the service environment. | |||
| Controller | ||||
| Input Voltage | AC 100 VAC (50/60 Hz) * If requested prior to shipping, this can be modified to AC 110, 115, 120, 220, or 240 V. | |||
| Power Consumption | Less than 100 VA | |||
| Controller Output | ±150 V max. | |||
| Output Terminal | D-sub 9-pin female | |||
| Input Terminal | USB terminal | |||
| Dimensions | 213(W) × 370(D) × 100(H) mm | |||
| Weight | Approx. 6 kg | |||
| Operatable Environment: Temperature Range | 5–40°C | |||
| Operatable Environment: Humidity Range | 15–80% * Cannot use under condensed conditions due to sudden changes in the service environment. | |||
| Accessories | ||||
| Standard Control Software CD-ROM | Windows® 7 or 10 (32 bit) Single-user license: 1 | |||
| Connection Cable (USB) | PC - Controller (3 m): 1 | |||
| Connection Cable (One-side Dsub 15) | 1.5 m: 1 | |||
| (Optional) Requested specifications for Notebook PC for Operation (Supplied or purchased separately by customer) | ||||
| OS (32 bit version) | Windows® 7 or 10 | |||
| USB Port | At least one | |||
| CD-ROM Drive | Required | |||
| Memory | At least 512 MB * To allow for optimal OS operation. | |||
| HDD | At least 10 MB available space | |||