Multi-Source High Temperature Thermal Evaporator UE-103C/104C
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LEFT: Main body of Evaporator, RIGHT: Main body of Evaporator with shutter function
- Thermal Evaporator UE-Series
- Multi-Source Thermal Evaporator
- Temperature Controller for Thermal Evaporator
| Structure | |
|---|---|
| Evaporator | Crucible-type evaporator |
| Heating Method | Direct resistance heating by filament |
| Inner Volume of Crucible | 3 mm (dia.) × 6 mm (depth) (material: alumina) |
| Number of Elements (Crucibles) | 4 for an evaporator with no shutter function; 3 for an evaporator with the shutter function.* The main body must be returned to Unisoku for crucible exchange. Additional expenses required. |
| Mounting Flange | ICF70 |
| Connector | 10-pin current lead terminal |
| Cooling Mechanism | A water-cooling jacket as standard (amount of water: 1L/min.)* Water cooling is indispensable especially when the evaporator is used at 1000°C or higher. |
| Distance from the Flange Face to the Crucible Head Tip | At least 100 mm from the mounting flange face to the crucible head tip (without shutter). The distance can be extended at your request at the time of order. |
| Target Distance | At least 100 mm from the crucible head tip |
| Vacuum Chamber Mounting Direction | The vacuum chamber must be mounted at least 30° from the horizontal. |
| Performance | |
| Heating Temperature Range | 700 ~ 1700°C (Recommended temperature for continuous use is 700 ~ 1600°C)* The maximum temperature is 1600°C (current: 7A) when a UNISOKU controller is used for temperature control. * The temperature measurement is not available if the evaporator has no thermometer. * There are some differences between temperature inside the crucible and setting temperature. |
| Heating Current | Max.7.5 A ~ 14 V |
| Baking Temperature | <200°C |
| Evaporation Element | |
| Material Form | Powder, granule, wire, and other forms that can be placed in the crucible. |
| Material Fill Volume | The recommended amount is 1/2 or less of the volume of the crucible (depending on the mounting angle).* Temperature measurement is not available if the evaporator has no thermometer. |
| Evaporation Materials | Elements that evaporate at 1700°C or lower. Note that elements that evaporate at 700°C or lower are difficult to control. |
| Shutter Function -- Provided as Standard for the L103CS/103CS Series | |
| Switching Mechanism | Manual switching using the rotary motion feedthrough (with a rotation stopper) |
| Shutter Plate | Size: 34 mm dia.; Rotation Diameter: 30 mm |
| Film Thickness Gauge Function -- Provided as Standard for the L103CSF/103CSF Series | |
| Film thickness Gauge Element Mounting Position | Shutter plate surface |
| Film Thickness Gauge Element | Crystal oscillator |
| Film Thickness Monitor | Inficon film thickness gauge element monitor (XTM/2) is provided as standard. |