Nano/Micro Rotation Stage UMP-1000R

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Nano/Micro Rotation Stage UMP-1000R

The Nano/Micro Rotation Stage UMP-1000R Series are small rotation stages developed for applications that require microscopic rotation and position detection in atmospheric and high-vacuum conditions.

Features

  • Compact design allows incorporation into a variety of Scanning Electron Microscopes (SEM) and Focused Ion Beam (FIB) systems. (Contact us for details)
  • Models are also available with optional rotational angle detection.
  • Installing the Unisoku XYZ Three-axis Nano-Manipulator/Prober's Z-stage enables applications that require a XYZ + R (Rotation) four-axis stage.
  • Easy operation from a Windows PC.

Primary Applications

  • Rotational operation and angle detection under SEM, FIB, and optical microscopy.
  • Nano/Micro-manipulation and probing combining XYZ operation and rotational operation.

Lineups

Rotation Stage (R)
  • Consists of stage unit, controller, and control software (PC optional).
  • Rotational angle detection is available as an option.
  • UMP-1000R: No rotational angle detection, UMP-1000RE: With rotational angle detection.
Rotation Stage UMP-1000R * Rotor shape can be modified Nano/Micro Rotation Stage UMP-1000R Series
Rotation Stage UMP-1000RE * Rotor shape can be modified Nano/Micro Rotation Stage UMP-1000R Series
XYZ Three-axis + Rotation (R) Stage
  • Consists of stage unit, controller, and control software (PC optional).
  • Rotational angle detection is available as an option.
  • UMP-1000UR: No rotational angle detection, UMP-1000URE: With rotational angle detection
Rotor UMP-1000UR * Rotor shape at tip can be modified. No rotational angle detection Nano/Micro Rotation Stage UMP-1000R Series
XYZ Three-axis + R (Rotation)
Four-axis Stage UMP-1000URE * With rotational angle detection
Nano/Micro Rotation Stage UMP-1000R Series

Specifications

Model No. UMP-1000R UMP-1000RE UMP-1000UR UMP-1000URE
Stage Type Rotation Stage XYZ + R (Rotation) 4-Axis Stage
Angle Detection No Angle Detection Angle Detection No Angle Detection Angle Detection
Unit (Stage)
Max. Range of Motion: XYZ Coarse (Pulse) Mode - - XY-axis: >5 mm, Z-axis: >3 mm (Custom orders acceptable)
Max. Range of Motion: XYZ Fine (DC) Mode - - XYZ-axis: >1μm * Modification (i.e., change to piezo element) possible by special order.
Max. Range of Motion: Rotation (Pulse) Mode >360°
Min. Resolution: XYZ Coarse (Pulse) Mode - - <150 nm * Modification (change to piezo element) possible by special order - values may vary.
Min. Resolution: XYZ Fine (DC) Mode - - Variable resolution: Max. Range of Motion in DC Mode/20,000 Guaranteed Resolution: Max. Range of Motion in DC Mode/2,000
Min. Resolution: Rotation (Pulse) Mode < 0.05°
Rotation Speed Approximately 30–120 s/1 rotation (variable) * Varies with size/shape of rotor
Detection Angle Reading Resolution - < 0.25° (Higher resolution available by special order.) - < 0.25° (Higher resolution available by special order.)
Rotary Shaft Eccentricity >100 μm (plus-minus Stand)
Input: Voltage ±150 V
Input: Extraction Line 2 (Twisted pair wire)
Input: Connector For D-sub terminal
Rotation Stage Dimensions (mm) Rotor OD: 18 mm dia. Stator OD: 30 mm dia. Rotor OD: 22 mm dia. Stator OD: 22 mm dia. Rotor OD: 17 mm dia. Stator OD: 22 mm dia.
Weight (Not including mounting base plate) < 100 g < 120 g < 180 g < 200 g
Operating Environment: Vacuum In air & 10-2 – 10-6 Pa In air & 10-2 – 10-4 Pa In air & 10-2 – 10-6 Pa In air & 10-2 – 10-4 Pa
Operating Environment: Service Temperature Range 4–40°C
Operating Environment: Service Humidity Range 15–80% * Cannot be used under condensation conditions due to sudden changes in the service environment.
Controller
Input Voltage AC 100 VAC (50/60 Hz) * If requested prior to shipping, this can be modified to AC 110, 115, 120, 220, or 240 V.
Power Consumption Less than 100 VA
Controller Output ±150 V max.
Output Terminal D-sub 9-pin female
Input Terminal USB terminal
Dimensions 213(W) × 370(D) × 100(H) mm
Weight Approx. 6 kg
Operatable Environment: Temperature Range 5–40°C
Operatable Environment: Humidity Range 15–80% * Cannot use under condensed conditions due to sudden changes in the service environment.
Accessories
Standard Control Software CD-ROM Windows XP/Vista (32 bit) Single-user license: 1
Connection Cable (USB) PC - Controller (3 m): 1
Connection Cable (One-side Dsub 15) 1.5 m: 1
(Optional) Requested specifications for Notebook PC for Operation (Supplied or purchased separately by customer)
OS (32 bit version) Windows XP or Vista
USB Port At least one
CD-ROM Drive Required
Memory At least 512 MB * To allow for optimal OS operation.
HDD At least 10 MB available space

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