UMP1000-4P NanoProber (UHV)

PDF 4-Nano-Probe System for SEM UMP-1000

Features

  • This system is installed in SEM stage and measures 4 point local electric conduction in submicron area.
  • Each probe position can be controlled in 3 dimensional directions in nanometer resolution by control circuits with notebook PC.

Specifications

XY Range
Coarse ±3 mm in ±150 nm steps
Fine ≤1 μm in 10 nm* steps
Z Range
Coarse ±1.5 mm in 150 nm steps
Fine ≤1 μm in 10 nm* steps
Sample Size 10 mm × 10 mm × 1 mm
Weight ≤1000 g
* 0.1 nm resolution is possible with optional software.

Basic Components

Components H/W/D (cm) Approx.
Nano Probe Unit 12 × 12 × 4
Controller Electronics 222 × 450 × 520
Notebook PC A4 size or B5 size
Pt:Ir Probe -
Accessories -

PDF