SPM, STM, AFM, Scanning Probe Microscope, Cryostat for Spectrophotometer- UNISOKU
UNISOKU for SPM, STM, AFM, Scanning Probe Microscope, Cryostat for SpectrophotometerUHV STM / AFM USM-1100
Ultrahigh Vacuum Scanning Probe Microscope System USM-1100 Series
UHV STM / AFM / USM-1100 Result Gallery (Sample Image Data)
UHV STM / AFM / USM-1100 Result Gallery (Sample Image Data)
USM-1100 series makes it possible to observe the sample surface in UHV at room temperature by STM and/or AFM.
This series is adaptable to your research requirements such as irradiation of light or radiation, deposition of atom, gas, or molecules, and measurement of luminescence, etc.
Other analytical tools are also combined to the system for extending applications.
- STM system: USM-1100S
- AFM system: USM-1100A
- STM/AFM system: USM-1100SA
This series is adaptable to your research requirements such as irradiation of light or radiation, deposition of atom, gas, or molecules, and measurement of luminescence, etc.
Other analytical tools are also combined to the system for extending applications.
Specification of UHV STM / AFM USM-1100
| Type of SPM | USM-1100S | USM-1100SA | USM-1100A | |
|---|---|---|---|---|
| ♦Observation Chamber | ||||
| Chamber | Stainless Steel 152mmφ (electro polished) | |||
| Base Pressure | ≤1.3×10-8Pa | |||
| SPM Specification | STM | STM | AFM*1 | AFM*1 |
| Vibration Isolation | Coil spring with eddy current dampening | |||
| Scan Range at RT*2 | >4µm | >4µm | >4µm | >4µm |
| Z Range*2 | >300nm at RT | >300nm at RT | >300nm at RT | >300nm at RT |
| Resolution Z*3 | <0.02nm | <0.02nm | <0.1nm*4 | <0.1nm*4 |
| Resolution X,Y*3 | <0.1nm | <0.1nm | <1nm*4 | <1nm*4 |
| Coarse Positioning(X) | N/A | N/A | N/A | N/A |
| ♦Load-Lock Chamber | ||||
| Chamber | Stainless Steel 114mmφ (electro polished) | |||
| Base Pressure | ≤1.3×10-5Pa | |||
| Storage(Sample Holders) | 3Holders | |||
| Storage (Probe Tips) | 3Tips | |||
| Spare Ports | ICF70×2 | |||
| ♦Preparation Chamber | ||||
| Chamber | Stainless Steel 203mmφ (electro polished) | |||
| Base Pressure | ≤1.3×10-8Pa | |||
| Storage(Sample Holders) | 2Holders | |||
| Storage (Probe Tips) | 4Tips | |||
| Sample Heating | Ohmic heating is available on the storage | |||
| Spare Ports | ICF70×4, ICF114×1, ICF203×1 | |||
| ♦Vacuum System | ||||
| Gate valve ICF114 | between Obsersation Chamber and Preparation Chamber | |||
| between Preparation Chamber and Load-Lock Chamber | ||||
| Angle valve ICF114 | between Load-Lock Chamber and Turbo Molecular pump | |||
| for Observation Chamber | ||||
| Pressure gauge | Nude ion gauge | |||
| Vacuum pump | 400lit./sec Ion-Sublimation combination pump | |||
| for Preparation Chamber | ||||
| Pressure gauge | Nude ion gauge | |||
| Vacuum pump | 1600lit./sec Ion-Sublimation combination pump | |||
| for Load-Lock Chamber | ||||
| Pressure gauge | Nude ion gauge | |||
| Vacuum pump | 70lit./sec Turbo Molecular pump with Rotary pump | |||
| ♦Vibration Isolation Table | Gimbal piston type air damper vibration isolation table | |||
*2 Scan voltage:±150V(max.) by Unisurface α
*3 The value in case of use Unisurface α or SPM1000(RHK Make)
*4 The value is assumed to be the one depending on the cantilever.
Acknowledge each specification the value to be might different according to installation features and the environment, etc.
SPM Controller and Data Acquisition System
option (UNISOKU SPM Controller or RHK SPM1000 Controller can operate this system)
This specification is base on 3 Chamber composition.
In case of 2 Chamber composition, it's specification is excepted blue background parts.
SPM Controller and Data Acquisition System
option (UNISOKU SPM Controller or RHK SPM1000 Controller can operate this system)
This specification is base on 3 Chamber composition.
In case of 2 Chamber composition, it's specification is excepted blue background parts.
| Basic Component | Observation Chamber |
|---|---|
| Load-Lock Chamber | |
| Preparation Chamber | |
| Vacuum System | |
| Vibration Isolation Table | |
| Standard Accessories | |
| SPM Controller (SPM controller you need to buy) |