PDF XYZ 3-Axis Nano Manipulator UMP-1000

UMP-1000 is a manipulator that travels in X, Y and Z axis at nanometer level. It can be used in a variety of ways such as manipulating/probing on a micrometer/nanometer scale, by combining with SEM/FIB/optical microscopes that are on the market.


Accurate and Easy Operation

Compatible with Windows PC. You can position samples quickly and accurately by switching between the coarse (pulse mode) and fine (DC mode) travel settings.

Works in a Wide Range of Operating Environments

This device can be used in a wide range of environments: from atmospheric pressure to ultrahigh vacuum, and from room temperature to very low temperature.

Good Deal

High performance, yet low cost.

Many Uses

This device can be used for various applications, such as nano-manipulation with a single unit and/or probing with multiple units.

  • Nano-manipulation
  • Probing (IV measurement of semi-conductor nano-devices, resistance measurement, EBIC measurement)
  • Wide range of applications on a micro/nanometer scale

Basic Components

Main Unit1 unit
Controller1 unit
Accessories1 set
Windows Laptop1 (Optional)


1. Main Unit
Maximum Travel Distance -
Pulse (Coarse) Mode X and Y axes 5 mm
Z axis 3 mm
DC (Fine) Mode X and Y axes 1 μm
Z axis 1 μm
Minimum Travel Distance (Resolution) -
Pulse (Coarse) Mode 150 nm or less (XYZ axes)
DC (Fine) Mode 0.5 nm or less (XYZ axes)
Operating Environment -
Temperature 4–310 K, baking temperature: 373 K or lower
Pressure Near atmospheric pressure or 10-2–10-8 Pa
(Due to discharge from piezoelectric elements, this device cannot be used in certain vacuum environment ranges)
Connection Cable (Output) Standard control terminal (Dsub-15) 2 m/1 set
* Works in Ultrahigh Vacuum/Low Temperature (job order production) 2 m/1 set
Body Dimensions (Approx. Includes Protrusion) H 25 mm × D 50 mm × W 20 mm (without probes)
Body Weight less than 60 g (without the attachment base)
2. Controller
Input Voltage 100 VAC (50/60 Hz) (the other input voltage is option)
Power Consumption 60 VA or less
Temperature Range 5–40°C
Humidity Range 15 – 60 %
Input/Output Control terminal (Dsub-15)
Dimensions W 430 × H 88 × D 350 mm
Weight less than 8 kg
3. Accessories
Standard Control Software CD-ROM 1
Connection Cable (USB) Windows PC - Controller 1 (3 m)
Connection Cables Controller 1 (5 m) (connectors are separate)
AC Cable 1 (1.5 m)
4. Windows Laptop (Optional)
OS Windows® 10 or 11
Interface USB (this device uses 1 port)
CD-ROM Drive 1
Memory 1GB(32bit),2GB(64bit) or more
HDD Over 10MB is needed as free space