Products > 4-Nano-Probe System for SEM UMP-1000
4-Nano-Probe System for SEM
UMP-1000
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| This system is installed in SEM stage and measures 4 point local electric conduction in submicron area. |
| Each probe position can be controlled in 3 dimensional directions in nanometer resolution by control circuits with notebook PC. |
| XY Range | |
|---|---|
| Coarse | ±3 mm in ±150 nm steps |
| Fine | ≤1 μm in 10 nm* steps |
| Z Range | |
| Coarse | ±1.5 mm in 150 nm steps |
| Fine | ≤1 μm in 10 nm* steps |
| Sample Size | 10 mm × 10 mm × 1 mm |
| Weight | ≤1000 g |
| Components | H/W/D (cm) Approx. |
|---|---|
| Nano Probe Unit | 12 × 12 × 4 |
| Controller Electronics | 222 × 450 × 520 |
| Notebook PC | A4 size or B5 size |
| Pt:Ir Probe | - |
| Accessories | - |