参数
| Structure |
| Evaporator |
Crucible-type evaporator |
| Heating Method |
Direct resistance heating by filament |
| Inner Volume of Crucible |
2.6 mm (dia.) × 6 mm (depth) (material: tantalum) |
| Number of Elements (Crucibles) |
Four for an evaporator with no shutter function; Three for an evaporator with shutter function.* The main body needs to be returned to UNISOKU for the crucible exchange. Additional expenses needed. |
| Mounting Flange |
ICF70 |
| Connector |
10-pin current lead terminal |
| Cooling Mechanism |
A water-cooling jacket is provided as standard. (amount of water: 1L/min.)* Water cooling is indispensable, especially when the evaporator is used at 500°C or higher. |
| Distance from the Flange Face to the Crucible Head Tip |
At least 100 mm (with no shutter). The distance can be extended on request at the time of order. |
| Target Distance |
At least 100 mm from the crucible head tip |
| Vacuum Chamber Mounting Direction |
The vacuum chamber must be mounted at an angle of at least 30° from the horizontal. |
| Performance |
| Heating Temperature Range |
150 ~ 800°C* There are some differences between the inside temperature of crucible and setting temperature. |
| Heating Current |
Max. 7.5 A ~ 14 V |
| Baking Temperature |
< 200°C |
| Evaporation Element |
| Material Form |
Powder, granule, wire, and other forms that can be placed in the crucible. |
| Material Fill Volume |
The recommended amount is 1/2 or less of the volume of the crucible (depending on the mounting angle). |
| Evaporation Material that Can Be Used |
Elements that can be evaporated at 800°C or lower. Elements that do not react to tantalum. |
| Recommended Elements |
Various organic molecules (Materials which evaporation temperature is lower than decomposition temperature) |
| Shutter Function - Provided as Standard for the 203CS Series |
| Switching Mechanism |
Manual switching using the rotary motion feedthrough (with a rotation stopper) |
| Shutter Plate |
Size: 34 mm dia.; Rotation diameter: 30 mm |
| Film Thickness Gauge Function - Provided as Standard for the 203CSF Series |
| Film Thickness Gauge Element Mounting position |
Shutter plate surface |
| Film Thickness Gauge Element |
Crystal oscillator |
| Film Thickness Monitor |
Inficon film thickness gauge element monitor (XTM/2) is provided as standard. |
LEFT: Main body of Evaporator, RIGHT: Main body of Evaporator with shutter function