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XYZ 3-axis Nanomanipulator/prober
XYZ 3-axis Nano-manipulator/prober UP-100U
UP-100U is a manipulator that can travel in the X, Y, and Z axes at the nanometer level. In combination with SEM/FIB/optical microscopes that are on the market, it can be used in a variety of ways such as manipulating/probing on a micrometer/nanometer scale.
Accurate and easy operation
Compatible with Windows PCs. You can position things quickly and accurately by switching between the coarse (pulse mode) and fine (DC mode) travel settings.Works in a wide range of operating environments
This device can be used in a wide range of operation/measurement environments, from atmospheric pressure to ultrahigh vacuum, and from room temperature to very low temperatures.High cost performance
High functionality/high performance and low cost are both achieved.Many uses
This device can be used for various applications, such as nano-manipulation with a single unit and/or probing with multiple units.- Nano-manipulation
- Probing (IV measurement of semi-conductor nano-devices, resistance measurement, EBIC measurement)
- Wide range of applications on a micrometer/nanometer scale
| Basic Component | 1. Main unit 1 unit |
|---|---|
| 2. Controller 1 unit | |
| 3. Accessories 1 set | |
| 4. Windows laptop (optional) 1 unit |
Specification of XYZ 3-axis Nano-manipulator/prober
| 1. Main unit | ||
|---|---|---|
| Maximum travel distance | ||
| Pulse (coarse) mode | X and Y axes | 5 mm |
| Z axis | 3 mm | |
| DC (fine) mode | X and Y axes | 1 micro m |
| Z axis | 1 micro m | |
| Minimum travel distance (resolution) | ||
| Pulse (coarse) mode | 150 nm or less (XYZ axes) | |
| DC (fine) mode | 0.5 nm or less (XYZ axes) | |
| Operating environment | ||
| Temperature | 4 K to 310 K, baking temperature: 373 K or less | |
| Pressure | Near atmospheric pressure or 10-2-2 Pa - 10-8 Pa | |
| (Due to discharge from piezoelectric elements, this device cannot be used in certain vacuum environment ranges) | ||
| Connection cable (output) | Standard control terminal (Dsub-15) 2 m/ 1set | |
| * Works in ultrahigh vacuum/ low temperature (job order production) 2 m/ 1set | ||
| Body dimensions (approximate, includes protrusion) | 25mm(H) X 50mm(D) X 20mm(W) | |
| Main body (without probes) | ||
| Body weight | less than 60 g | |
| Main body (without the attachment base) | ||
| 2. Controller | ||
| Input voltage | 100 VAC (50/60 Hz) (the other input voltage :option) | |
| Power consumption | 100 VA or less | |
| Temperature range | +5 deg C to +40 deg C | |
| Humidity range | 15% to 80% | |
| Input/output | Control terminal (Dsub-15) | |
| Dimensions | 480mm(W) X 100mm(H) X 460mm(D) | |
| Weight | less than 6 kg | |
| 3. Accessories | ||
| Standard control software CD-ROM | 1 | |
| Connection cable (USB) | Windows PC/Controller | (3.0 m) 1 |
| Connection cables | Controller (5 m) | (5 m) 1 (connectors are separate) |
| AC cable (1.5 m) | (1.5 m) 1 | |
| 4. Windows laptop (optional) | ||
| OS | Windows XP | |
| Interface | USB (device uses 1 port) | |
| CD-ROM drive | 1 | |
| Memory | 512 MB or more | |
| HDD | 10 GB or more | |
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