| Load lock chamber |
| 114 mm diameter |
| 10-5 Pa in 20 min pumping time |
| ICF 70 gate valve |
| ICF 114 quick accesses door can be exchange to conflat flange |
| ICF 114 pumping port using L valve |
| 70 L/sec TMP and 110 L/min rotary pump |
| ICF 70 leak valve and ion gauge port |
| ICF 70 magnetic transfer rod |
| Preparation chamber |
| 152 mm diameter |
| 10-8 Pa base pressure |
| Ports for accessories ICF 152, ICF114, 12 x ICF 70 |
| Transfer rod for manipulating sample and probe stage |
| 4 sample and 4 probe can be hold on the stage |
| Sample current and EB heating is possible on the stage |
| ICF 70 gate valve is installed on the Insert chamber |
| 150 L/sec ion pump with TSP is installed |
| LT STM chamber |
| Cryostat |
| 40 L LHe cryostat with super insulation |
| Low LHe consumption 0.35 L/hour |
| LHe level mater and temperature controller are included |
| Insert |
| Variable temperature design from 2.5 K to RT |
| Super conducting magnet 8 T can be installed as a option |
| STM (AFM function is possible) |
| Coarse adjust of sample stage is installed, displacement of 0.5 mm in XY directions |
| Coarse displacement of 3 mm in Z direction |
| Scanning range: 4 micrometer in XY direction at RT |
| Servo range: 0.7 micrometer in Z direction |
| Scanning and servo range are decreased 1/3 at 4K |