SPM, STM, AFM, Scanning Probe Microscope, Cryostat for Spectrophotometer- UNISOKU
UNISOKU for SPM, STM, AFM, Scanning Probe Microscope, Cryostat for SpectrophotometerUNISOKU Top Page > PRODUCTS > UHV Room Temperature STM System
UHV STM / AFM USM-1000
NEWUHV Room Temperature STM SystemUSM-1000
Feature
| 1. Light angle excitation by LASER beam is possible to sample surface |
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| 2. Optical access or light emission detection are possible |
| 3. Sample specimen can be heat up to 400 deg C at observation position |
| 4. Sample holder can be cooled down to about 120K by LN2 flow using Cooling Unit (Option) |
| 5. Metal or other materials can be deposited to sample surface from deposition port using proper evaporator |
| 6. STM stage have double spring vibration isolation |
| 7. Sample and probe holders are easily exchanged by transfer rod |
Configuration
| Observation chamber x1 |
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| STM stage x1 |
| Load-lock Chamber x1 |
| Preparation chamber x1 |
| Vibration isolation table (Option) |
| STM contoller electronics and data processing software (Option) |
Specification of Cryostat For Spectrophotometer USP-203-A / USP-203CD-A
| Observation chamber | |
|---|---|
| Chamber | 203 mm dia. made of stainless steel SUS-304. Inside is chemical polished for UHV use |
| Ports on the main chamber | ICF 70 x 2 for horizontal 40 deg. optical meas. or excitation |
| ICF 70 x 2 for horizontal 0 to 5 deg. optical meas. or excitation | |
| ICF 70 x 2 upward ports for deposition (The elevation angle) | |
| ICF 70 x 1 port for ion gauge with large pipe | |
| ICF 70 x 2 downward view ports for observing sample surface | |
| ICF 70 x 2 downward view ports for looking sample exchange | |
| ICF 152 top side port, (spare port for view window or attachment) | |
| ICF 152 bottom side port, for vacuum pump | |
| Front flange | ICF 253 for STM stage |
| ICF 34 x 7 for connecters and linear motion feed through | |
| ICF 70 x 1 for optional cooling head | |
| Rear flange | ICF 203 connect to preparation chamber |
| STM stage | |
| STM stage and middle stage are supported by coil springs and magnet. Dampers are installed for vibration isolation. A linear motion feed through is used for locking stage. | |
| Z coarse stage | Using piezo stack, 3 mm stroke |
| XY scanning area | 4 x 4 micrometer max |
| Z servo range | 0.4 micrometer |
| Resolution | Atomic resolution |
| Sample stage | Coarse motion of XY direction 2 mm stroke using step motion piezo |
| Sample holder 3units | Bayonet type with 3 electrodes (standard) or 6 electrodes (option) |
| Probe holder 3units | Screw type made by SUS |
| Probe | Pt;Ir probe (0.5 mm dia.) or Tungsten probe, (0.3 mm dia.) are normally used. |
| Load-lock Chamber | |
| Chamber | 114 mm dia. made by stainless-steel SUS-304, Inside surface is chemical polished. |
| Gate valve | ICF 70 |
| Top flange | ICF70 with quick access door |
| Leak valve | ICF 70 manual |
| Vacuum port | ICF 114 with manual angle valve |
| Ion gauge port | ICF 70 with large pipe |
| Transfer rod | Magnetic transfer rod for sample and probe transfer |
| Preparation chamber | |
| Chamber | 203 mm dia. made of stainless steel SUS-304, Inside is chemical polished for UHV use. |
| Top flange | ICF 203 for sample manipulator and connectors for sample heating. |
| Bottom flange | ICF 253 for vacuum pump, Optional adapter is need for pump. |
| Flanges on the chamber | ICF 70 x 2 for sample exchange, a gate valve is included, ICF 152 spare port for attaching LEED, ICF 70 x 2 spare port for attaching ion gun and RHEED source, ICF 114 spare port for attaching RHEED screen, ICF 70 x 4 down ward ports for viewing windows (included), ICF 70 x 3 up ward spare ports for deposition source, ICF 70 large pipe, ICF 114 for spare, ICF 70 x 2 for spare |
| Gate valve | ICF 70 |
| Transfer rod | Magnetic transfer rod for manipulating sample stage. The sample stage can hold 4 sample holders and 4 probe holders and one heating stage for sample heating. Optional XY stage of 12.5 mm stroke can be installed for horizontal adjustment, if LEED and RHEED are attached. |
| Options | |
| Special probe holder | Dual, or Triple layer probe holder are available on request. Special probe receptor is needed on the scanning piezo. This request should be ordered before delivery. |
| Sample cooling system | Sample holder cooling is possible by adapting this system on the front flange, cooling temperature is about 30 K using liquid helium and about 120K flowing liquid nitrogen. |
| Special sample holder | K type thermocouple is available for direct temperature measurement. This request should be ordered before delivery. |
| Other options | Spatter ion gun, Tip heating EB gun, Tip making system, 4 channel deposition K cell, HV source for EB sample heating, Illumination lamp source and other accessories made by Unisoku can be used for attachments of this system. |
| Controller | Unisurface Alfa SPM controller made by Unisoku new designed controller of digital feed back using DSP is available. RHK SPM-1000 STM controller with PMC100 or other commercial STM controller is possible to connect on customer request. |
| Table option 1) | Standard system table made by steal. This table can be used in the room of stable floor, vibration should be less than 2 micrometer amplitude of 1 to 500 Hz frequency range. |
| Table option 2) | Vibration isolation table made by steal with air damper. |