UNISOKU > Products > SPM(STM/AFM) Products > UHV ULT STM /AFM USM-1200

Ultrahigh Vacuum and Ultra Low Temperature Scanning Probe Microscope System USM-1200 Series

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UHV-ULT STM / AFM USM-1200 Result Gallery (Sample Image Data)

UHV STM / AFM USM-1200 picture

UHV-ULT STM / AFM USM-1200 Result Gallery (Sample Image Data)

USM-1200 series makes it possible to observe the sample surface in UHV at ultra-low temperature by STM and/or AFM.
  • STM system: USM-1200S
  • AFM system: USM-1200A
  • STM/AFM system: USM-1200SA
This series realize high performance, multi-functional, and easy-to use UHV LT SPM in good balance.
This series is adaptable to your research requirements such as irradiation of light or radiation, deposition of atom, gas, or molecules, and measurement of luminescence, etc.
Other analytical tools are also combined to the system for extending applications.

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Specification of UHV ULT STM /AFM USM-1200

Type of SPMUSM-1200SUSM-1200SAUSM-1200A
* Observation Chamber
ChamberStainless Steel phi 152mm (electro polished)
Base Pressure≤1.3 x 10-8Pa
SPM SpecificationSTMSTMAFM*1AFM*1
Vibration IsolationCoil spring with eddy current dampening
Scan Range at RT/10K*2>2 micro m/0.6 micro m*4>4 micro m/1.2 micro m>4 micro m/1.2 micro m>4 micro m/1.2 micro m
Z Range*2>250nm at RT*4>300nm at RT>300nm at RT>300nm at RT
Resolution Z*3<0.02nm<0.02nm<0.1nm*5<0.1nm*5
Resolution X,Y*3<0.1nm<0.1nm<1nm*5<1nm*5
Coarse Positioning(X) plusminus 2mmN/AN/AN/A
Cooling Specification
Tank Volume3lit.
Thermal shieldingdouble shielding
Thermal shutterdouble shutters
Cooling temperature<10K
Consumption of liquid He0.5lit./hour
Spare PortsICF70 x 2
* Load-Lock Chamber
ChamberStainless Steel phi 114mm(electro polished)
Base Pressure≤1.3 x 10-5Pa
Storage(Sample Holders)3Holders
Storage (Probe Tips)3Tips
Spare PortsICF70 x 2
* Preparation Chamber
ChamberStainless Steel phi 203mm(electro polished)
Base Pressure≤1.3 x 10-8Pa
Storage(Sample Holders)2Holders
Storage (Probe Tips)4Tips
Sample HeatingOhmic heating is available on the storage
Spare PortsICF70 x 4, ICF114 x 1, ICF203 x 1
* Vacuum System
Gate valve ICF114between Obsersation Chamber and Preparation Chamber
between Preparation Chamber and Load-Lock Chamber
Angle valve ICF114between Load-Lock Chamber and Turbo Molecular pump
for Observation Chamber
Pressure gaugeNude ion gauge
Vacuum pump400lit./sec Ion-Sublimation combination pump
for Preparation Chamber
Pressure gaugeNude ion gauge
Vacuum pump1600lit./sec Ion-Sublimation combination pump
for Load-Lock Chamber
Pressure gaugeNude ion gauge
Vacuum pump70lit./sec Turbo Molecular pump with Rotary pump
* Vibration Isolation TableGimbal piston type air damper vibration isolation table
*1 Piezo resistive type
*2 Scan voltage: plusminus 150V(max.) by Unisurface ALPHA
*3 The value in case of use Unisurface ALPHA or SPM1000(RHK Make)
*4 The value in case of use the special machine for STM.
*5 The value is assumed to be the one depending on the cantilever.
Acknowledge each specification the value to be might different according to installation features and the environment, etc.
SPM Controller and Data Acquisition System
option (UNISOKU SPM Controller or RHK SPM1000 Controller can operate this system)
This specification is base on 3 Chamber composition.
In case of 2 Chamber composition, it's specification is excepted blue background parts.
Basic ComponentObservation Chamber
Load-Lock Chamber
Preparation Chamber
Vacuum System
Vibration Isolation Table
Standard Accessories
SPM Controller (SPM controller you need to buy)

UHV-ULT STM / AFM USM-1200 Result Gallery (Sample Image Data)

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