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4-Nano-Probe System for SEMUMP-1000

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4-Nano-Probe System for SEM UMP-1000 picture

Feature

This system is installed in SEM stage and enable to measure 4 point local electric conduction in submicron area.
Each probe position can be controlled in 3 dimensional directions in nanometer resolution by control circuits with notebook PC.
Adding a Contact Detection Function by using Piezo Resistive Cantilever as OPTION.

Specification 4-Nano-Probe System for SEM

XY Range
Coarse±3 mm in ±150 nm steps
Fine≤1µm in 10 nm* steps
Z Range
Coarse±1.5mm in 150 nm steps
Fine≤1µm in 10 nm* steps
Sample Size10mm×10mm×1mm
Weight≤1000g
* 0.1nm resolution is possible with optional software.
Basic ComponentH/W/D (cm) / Approx.
Nano Probe Unit : 112×12×4
Controller Electronics : 1222×450×520
Notebook PC : 1A4 size or B5 size
Pt:Ir Probe : 1-
Accessories : 1-
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