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Nano/Micro Rotation Stage UP-200R Series
Nano/Micro Rotation Stage UP-200R Series
The Nano/Micro Rotation Stage UP-200R Series are small rotation stages developed for applications that require microscopic rotation and position detection in atmospheric and high-vacuum conditions.
Features
| Compact design allows incorporation into a variety of scanning electron microscopes (SEMs) and focused ion beam (FIB) systems. (Contact us for details) |
|---|
| Models are also available with optional rotational angle detection. |
| Installing the Unisoku XYZ Three-axis Nano-manipulator/Prober's Z-stage enables applications that require a XYZ+R (rotation) four-axis stage. |
| Simple operation from a PC running Windows. |
Primary Applications
Rotational operation and angle detection under SEM, FIB, and optical microscopyNano/Micro-manipulation and probing combining XYZ operation and rotational operation
Lineup
Rotation Stage (R)
Consists of stage unit, controller, and control software (PC optional). Selectable rotational angle detection function.Model No.
UP-200R...No rotational angle detection function
UP-200RE...With rotational angle detection function
XYZ Three-axis + Rotation (R) Stage
Consists of stage unit, controller, and control software (PC optional). Selectable rotational angle detection function.Model No.
UP-200UR...No rotational angle detection function
UP-200URE...With rotational angle detection function
| Rotation Stage UP-200R * Rotor shape can be modified |  |
|---|---|
| Rotation Stage UP-200RE * Rotor shape can be modified | |
| Rotor UP-200UR *Shape of rotor at tip can be modified (No rotational angle detection function) |  |
| XYZ Three-axis + R (Rotation) Four-axis Stage UP-200URE (With rotational angle detection function) |  |
Specification of Nano/Micro Rotation Stage UP-200R Series
| Model No. | UP-200R | UP-200RE | UP-200UR | UP-200URE |
|---|---|---|---|---|
| Stage Type | Rotation Stage | XYZ+R (Rotation) Four-axis Stage | ||
| Angle Detection Function | No Angle Detection Function | With Angle Detection Function | No Angle Detection Function | With Angle Detection Function |
| Unit (Stage) | ||||
| Max. Range of Motion:XYZ Coarse (Pulse) Mode | - | - | XY-axis: >5 mm, Z-axis: >3 mm (*Modification possible by special order) | |
| Max. Range of Motion:XYZ Fine (DC) Mode | - | - | XYZ-axis: >1 micro m (*Modification (i.e., changes to piezo element) possible by special order) | |
| Max. Range of Motion: Rotation (Pulse) Mode | >360 degrees C | |||
| Min. Resolution: XYZ Coarse (Pulse) Mode | - | - | <150 nm (*Modification (changes to piezo element) possible by special order-values may vary) | |
| Min. Resolution: XYZ Fine (DC) Mode | - | - | Variable resolution: Max. Range of Motion in DC Mode/20,000 Guaranteed resolution: Max. Range of Motion in DC Mode/2,000 | |
| Min. Resolution: Rotation (Pulse) Mode | <0.05 degrees C | |||
| Rotation Speed | Approximately 30s-120s/1 rotation (variable) *Varies with size/shape of rotor | |||
| Detection Angle Reading Resolution | - | <0.25 degree C (*Higher resolution possible by special order.) | - | <0.25 degree C (*Higher resolution possible by special order.) |
| Rotary Shaft Eccentricity | >100 micro m (plus-minus Stand) | |||
| Input:Voltage | plus-minus 150V | |||
| Input:Extraction Line | 2 (Twisted pair wire) | |||
| Input:Connector | For D-sub terminal | |||
| Rotation Stage Dimensions (mm) | Rotor OD: 18 mm dia. Stator OD: 30 mm dia. | Rotor OD: 22 mm dia. Stator OD: 22 mm dia. | Rotor OD: 17 mm dia. Stator OD: 22 mm dia. | |
| Weight (Not including mounting base plate) | <100g | <120g | <180g | <200g |
| Operating Environment:Vacuum | In air & 10-2 - 10-6 Pa | In air & 10-2 - 10-4 Pa | In air & 10-2 - 10-6 Pa | In air & 10-2 - 10-4 Pa |
| Operating Environment:Service Temperature Range | 4 degrees C - 40 degrees C | |||
| Operating Environment:Service Humidity Range | 15%-80% *Cannot be used under condensation conditions due to sudden changes in the service environment | |||
| Controller | ||||
| Input Voltage | AC100 VAC (50/60 Hz) *(If requested prior to shipping, this can be modified to AC110, 115, 120, 220, or 240 V) | |||
| Power Consumption | Less than 100 VA | |||
| Controller Output | plus-minus 150 V max. | |||
| Output Terminal | D-sub 9-pin female | |||
| Input Terminal | USB terminal | |||
| Dimensions | 213(W)x370(D)x100(H) mm | |||
| Weight | Approx. 6kg | |||
| Operating Environment:Service Temperature Range | 5 degrees C - 40 degrees C | |||
| Operating Environment:Service Humidity Range | 15%-80% *Cannot be used under condensation conditions due to sudden changes in the service environment | |||
| Accessories | ||||
| Standard Control Software CD-ROM | Windows XP/Vista (32-bit) Single-user license : 1 | |||
| Special Connection Cable (USB) | PC - Controller (3 m) : 1 | |||
| Special Connection Cable (One-side Dsub 15) | 1.5 m : 1 | |||
| Optional Requested specifications for Notebook PC for Operation (Supplied or purchased separately by customer) | ||||
| OS (32-bit version) | Windows XP or Vista | |||
| USB Port | At least one | |||
| CD-ROM Drive | Required | |||
| Memory | At least 512 MB *To allow for optimal OS operation. | |||
| HDD | At least 10 MB available space | |||
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