Figure : Si (111) 7×7 by NC-AFM
Extreme Physical Fields SPM / USM-1400 Result Gallery (Sample Image Data)
| Measurement mode | Self-sensitive NC-AFM, STM |
|---|---|
| XY scan range (Room temp./4.2K) | 3µm×3µm / 0.7µm×0.7µm |
| Ultimate pressure | < 10-10 Torr |
| Temperature 2.5K at STM mode, 5K at NC AFM mode | |
| Coarse motion of sample stage | ±0.5mm(XY) |
| Observation temperature | 2.5K(STM) / 5K(AFM) |
| Control range of temperature | 2.5K-50K (VTI mode) |
| Material of SPM stage | Titanium and oxygen free copper |
| Applied magnetic field | 7 Tesra max. (option 11Tesra max.) |
| SPM Controller | SPM1000 made by RHK technology |
| AFM detection circuit | PLL circuit |
| Preamplifier | STM and Non-contact AFM |
| Basic Component | Load-lock chamber 1 |
|---|---|
| Preparation chamber 1 | |
| Observation chamber 1 | |
| SPM Control systems 1 | |
| Ar Sputter Ion Gun 1 |
Extreme Physical Fields SPM / USM-1400 Result Gallery (Sample Image Data)