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Guide for Test Marketing Release of Carbon Nanotube (CNT) SPM Probes

UNISOKU has successfully grown CNT on nickel probes and cantilevers by CVD. This has allowed us to maintain conductivity*1 and reduce the separation at the CNT-probe interface.

CNT Probe Line-up

Nickel STM Probe with CNT

Nickel STM Probe with CNT PictureNickel STM Probe with CNT Figure

Specification

Multiple structurally and chemically stable carbon
nanotubes are grown on a Ni probe.

Characteristics

Allows reliable STM measurements to be carried out.

Nickel Contact Probe with CNT

Nickel Contact Probe with CNT PictureNickel Contact Probe with CNT Figure

Specification

Probes with a single carbon nanotube at the tip are
selected from Ni probes on which CNT have been grown.

Characteristics

High aspect ratio and rigidity, enabling nano-order
probing.

AFM Cantilever with CNT

AFM Cantilever with CNT Picture Cantilever Body
Budget Sensors Co.Tap 300 Al-G
AFM Cantilever with CNT Figure

Specification

CNT are grown on an over-the-counter Si cantilever.

Characteristics

High resolution and durability. Because magnetic metals
are included, it can also be used for MFM.*2

This product is currently in the trial marketing phase to evaluate performance and yield. Limit sales only to cooperating users. Anticipated features are not yet guaranteed for this product.

*1: STM-level conductivity has been confirmed, but metal thin film-coated products can be produced for contact probes.
*2: Development and evaluation results by Toyota Technological Institute's Yoshimura Laboratory

JST Japan Science and Technology Agency These products were jointly developed by Toyota Technological Institute, the University of Tokyo, and Osaka University in the Development of Systems and Technology for Advanced Measurement and Analysis project.